Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam

Biomimetic Acoustic Sensor Using Single Crystal Piezoelectric Cantilever Array

A biomimetic acoustic sensor was fabricated with single crystal PMN-PT piezoelectric cantilever array that can mimic functional properties of mammalian cochlea. Basilar membrane of mammalian cochlea can separate frequency components of input sound source and Ion channel phenomenon of hair cells on basilar membrane can generate action potentials for stimulating a nerve site. The piezoelectric ca...

LETTERS Design and focused ion beam fabrication of single crystal diamond nanobeam cavities

We present the design and fabrication of nanobeam photonic crystal cavities in single crystal diamond for applications in cavity quantum electrodynamics. First, we describe three-dimensional finite-difference time-domain simulations of a high quality factor Q 106 and small mode volume V 0.5 /n 3 cavity whose resonance corresponds to the zero-phonon transition 637 nm of the nitrogen-vacancy colo...

Design and focused ion beam fabrication of single crystal diamond nanobeam cavities

Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

Single Crystal Diamond Schottky Photodiode

Thanks to its extreme optical and electronic properties, diamond appears to be a promising semiconducting material for photon detection. Its wide band-gap, 5.5 eV, results in a very low leakage current and its electronic properties as high carrier mobility allow fast time response (J. E. Field, 1979). Besides, it has a large breakdown electric field (∼10 V/┤m), a low dielectric constant (i.e. l...